学术报告（6月20日）

主持人：董建文

Abstract

The advancement of integrated circuits (ICs) stimulates the development of failure analysis (FA) techniques. As a non-destructive technique, optical microscopy using aplanatic solid immersion lens (ASIL) provides higher spatial resolution, improved light collection efficiency and the capability of subsurface imaging. Although this technique has been experimentally employed to image ICs, the resolution cannot satisfy the increasing requirements of FA.

In order to obtain better resolution, a complete and computationally efficient model of ASIL microscope is presented, which considers all of the components that influence resolution and therefore provides the opportunity to precisely vary individual parameters and then to explicitly evaluate the performance of a microscope. Base on the theoretical model, different polarizations and different pinhole sizes are used to image object structure in the ASIL scanning microscopy. 100 nm resolution is achieved theoretically and experimentally, which satisfys the current 14 nm semiconductor technology. This technique has been applied in the industrial solid immersion microscope for failure analysis of integrated circuits, which is beneficial to maintain the quality and reliability of ICs in FA.

Short Biography

Dr. Chen Rui is currently a research fellow of Department of Bimedical Engineering at the National University of Singapore (NUS). He received his PhD in the Department of Electrical and Computer Engineering (ECE) in 2014 from  National University of Singapore. He also received his Master’s degree in electromagnetic field and microwave technology in 2010 (Nanjing Research Institute of electronics Technology (NRIET), China), and Bachelor Degree in Electrical Information Engineering in 2007 (Xidian University, China), repectively. He joined the Department of ECE department as a research fellow in NUS at Dec, 2013. His research interests include superresolution microscopy imaging, microwave imaging and inverse reconstruction. He has published several papers in the international leading journals , such as Optica, Optica letters, Optics express and Physical Review X.